EL-FLOW®Classic series Mass Flow Controllers for gas applications have a housing designed for laboratory and clean processing conditions. The instruments are designed to measure and control gas flow ranges between 0.16…8 sccm and 0.4…20 slm at an operating pressure between atmospheric pressure and 30 bar(g). The integrated control valve ensures extremely fast and smooth control. 

Link:

https://www.bronkhorst.co.uk/files/downloads/brochures/el-flow_classic.pdf